Abstract: A catalyst using ZSM-5 zeolite as a component was developed to catalyze ethylbenzene dealkylation. Chemical liquid deposition (CLD) modification by silicon-containing compounds was performed to improve the catalyst pore dimensions in order to enhance the selectivity of dealkylation and reduce the disproportionation and transalkylation. The catalytic performance are tested in a fixed bed reactor under the reaction conditions of temperature 673-693K, hydrogen partial pressure of 1.8MPa, weight hourly space velocity of 10-15h-1, H2/feed molar ratio of 1-2, xylene yield could reach 98.81% and EB conversion is up to 90.19%.